국제반도체장비재료협회(SEMI)가 세계 반도체 산업의 핵심 안전 기준인 SEMI S2-0724 개정판을 한글로 번역해 반도체 제조 장비의 설계 및 안전성 평가 전 분야에서 최신 안전 기준을 현장에 바로 적용할 수 있을 것으로 기대된다.
Application of the latest safety standards in all areas of semiconductor manufacturing equipment design and safety evaluation
The latest Korean translation of 'SEMI S2', the core safety standard of the global semiconductor industry, has been released, and it is expected that the latest safety standards will be able to be applied directly to the field in all areas of design and safety evaluation of semiconductor manufacturing equipment.
The Semiconductor Equipment and Materials International (SEMI) announced on the 2nd that it will translate and distribute the revised SEMI S2-0724 edition so that domestic practitioners can easily and accurately understand and apply it.
It has resolved the high barrier to entry for semiconductor equipment manufacturers and small and medium-sized partners, as it was previously only available in English.
SEMI S2 is an international standard applicable to all areas of design and safety evaluation of semiconductor and display manufacturing equipment. It details safety requirements for mechanical, electrical, and gas systems to reduce the risk of fire, electric shock, and explosion, as well as emergency stop and interlock functions.
It is being used as an essential guideline in large fabs and research institutes at home and abroad.
A total of 26 experts in the equipment, testing, and certification fields, including five EHS (safety, health, and environment) experts from Samsung Electronics and SK Hynix, as well as Applied Materials, ASM, ASML, ICR, KTR, PCA, Safe World Engineering, Salus Engineering International, Tokyo Electron, and Wonik IPS, participated in this translation project.
The working group organized by SEMI Korea will hold regular meetings for four months starting in March of this year. We conducted a review of terminology unification and accuracy of expression as well as field tests.
The translation faithfully reflects the major revisions to SEMI S2-0724.
It clearly explains in Korean terms the detailed requirements in eight areas: High Pressure System, Equipment Decommissioning, Fire Protection, Flammable Substances, SEMI S30 (Energetic Materials), Lifting Equipment and Hinged Loads, and Safety Labels.
Practitioners can intuitively understand the obligations and application cases for each provision.
“This translation corrects existing errors and is designed to immediately reflect the latest safety standards in the field,” said Nam Seung-kyung, senior project leader at ASM. “It will significantly reduce the confusion in interpretation that practitioners experience during the design and evaluation process.”
PCA Manager Park Hyeon-jun also emphasized, “We will support small and medium-sized partner companies to easily understand SEMI S2, shorten the certification and evaluation period, and reduce costs.”
SEMI has established a total of 30 safety standards for the semiconductor and display industries over the past 50 years, and S2 is recognized as a core document among them.
Since 2013, SEMI has published six standard Korean translations, including S6, S10, S14, S21, S23, and S29, and has released a total of seven documents, including this translation.
The Korean translation is available free of charge on the SEMI official website (www.semi.org) and through the SEMIViews subscription service.Ram can be downloaded.
It will also be distributed through the official channels of SEMI Korea and the Korea Semiconductor Industry Association (KSIA), and will be used as a major reference material when establishing national standards (KS) in the future.
A SEMI official said, “With the release of the Korean translation, the level of domestic semiconductor equipment safety management will be greatly improved, and the efficiency of the certification and evaluation process will be greatly improved.”